Capacitive pressure sensor used in industrial measurement transducer, has dielectric section integrally formed in diaphragm, which is moved in gap between capacitor plates to output signal indicating pressure change

摘要

The sensor includes a top frame (106) enclosing a diaphragm (114) with an integral dielectric section (120). Two capacitor plates with preset gap inbetween are formed in a bottom frame. Electrical signal indicating pressure change is output, when dielectric section is moved in the gap formed between capacitor plates.