Bulk chemical delivery system

摘要

Bulk chemical delivery system including a manifold for use in refill of canister containing chemicals, wherein a vacuum supply valve is connected to a vacuum source (14), wherein the vacuum source (14) is connected to a pressure vent valve (20) and a first control valve (60) ; wherein the first control valve (60) connects to a second control valve (70) ; wherein a carrier gas isolation valve (30) is connected to the pressure vent valve (20) and a canister bypass valve (40) ; wherein the canister bypass valve (40) is further connected to the carrier gas isolation valve (30) and a second control valve (70) ; wherein a process line isolation valve (50) is also connected to a third control valve (80); wherein the canister inlet valve (90) is connected to the second control valve (70) and the third control valve (80); and wherein the canister outlet valve (100) is further connected to the third control valve (80).