| 摘要 |
PURPOSE: A UV cleaner is provided to shorten processing time by preheating a substrate and of supplying sufficient oxygen to a chamber as well as preventing ozone within the chamber from being escaped toward atmosphere by forming an air curtain in front of a door of the chamber. CONSTITUTION: The UV cleaner comprises a substrate preheating part(38) for preheating a substrate(40) and an UV cleaning part for foreign substance on the substrate by radiating UV to the substrate. Further, an air supply part for forming an air curtain is formed between the substrate preheating part and the UV cleaning part to supply oxygen toward the UV cleaning part. Further, the UV cleaning part comprises an UV radiating part(22) for radiating UV to the substrate(40), and a substrate heating part for heating the substrate(40).
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