| 摘要 |
PURPOSE: A forcible pollution evaluation system of ultra pure water is provided to identify an inferiority inducing level by cleaning a wafer with ultra pure waters of which pollution source concentration is different one another, and quantify the water quality maintenance of the ultra pure water used in the cleaning process, thereby achieving economical maintenance. CONSTITUTION: A forcible pollution evaluation system of ultra pure water includes a wet tub(10) for storing ultra pure water for cleaning a wafer, an oxygen supply tube having a regulator(20) for controlling an oxygen supply amount supplied to the wet tub and a dissolved oxygen MFC(Mass Flow Controller;30) for uniformly controlling and supplying a dissolved oxygen amount from the supplied oxygen, a first ultra pure water supply tube(40) for supplying ultra pure water to the wet tub, an organism supply tube(50) for selectively supplying different organisms, an organism concentration controller(60) connected to the first ultra pure water supply tube and the organism supply tube for uniformly mixing the supplied ultra pure water with the organisms to control the concentration of the organisms, a second ultra pure water supply tube(90) for supplying ultra pure water to dilute the concentration-controlled organisms and supplying the diluted organisms to the wet tube, and a quantitative pump(70) mounted between the organism concentration controller and the second ultra pure water supply tube for controlling the flow ratio of the concentration-controlled organisms.
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