Projection optical system that projects an image of a pattern formed on a reticle onto a substrate

摘要

A projection optical system that projects an image of a pattern formed on a reticle onto a substrate comprising, in the light path order from the reticle: a first group with positive refractive power, said first group comprising at least two positive lenses; a second group comprising at least four positive lenses and at least four negative lenses; a third group with positive refractive power, said third group comprising at least two positive lenses; and at least one aspherical lens surface included in at least one of said first, second and/or third group.