APPARATUS FOR AUTOMATICALLY ADJUSTING OPERATION POSITION OF BLIND OF SEMICONDUCTOR STEPPER

摘要

PURPOSE: An apparatus for automatically adjusting an operation position of a blind is provided to more precisely perform a position adjustment of the blind of a semiconductor stepper, and to shorten manufacturing time by reducing time for the position adjustment. CONSTITUTION: An exposure pattern of a predetermined size projected through a blind(100) is photographed in a charge coupled device(CCD)(102). A position operation unit(104) measures the position of the exposure pattern photographed through the CCD, and calculates data according to the measured position. A control unit(106) changes the position of the blind according to position data calculated from the position operation unit. The control unit stops position change of the blind if the position data calculated from the position operation unit reaches predetermined position data.