Electron beam aperture element,申请号GB19970010019-传众专利搜索

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发明名称	Electron beam aperture element
摘要
申请公布号	GB2325335(B)	申请公布日期	2001.07.11
申请号	GB19970010019	申请日期	1997.05.16
申请人	* LEICA LITHOGRAPHY SYSTEMS LIMITED	发明人	TAO * ZHANG
分类号	G01Q70/10;H01J37/09;(IPC1-7):H01J37/09	主分类号	G01Q70/10
代理机构		代理人
主权项
地址

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