| 摘要 |
There is provided a lamp unit for light radiating type heating device which allows efficient cooling of the lamps, and the temperature increase of a semiconductor wafer irradiated with the lamp unit is faster than in the prior art without the need of a complicated and large cooling structure. The lamp unit comprises a first group (7A) of lamps arranged in a first plane and a second group of lamps (7B) arranged in a second plane, wherein each group comprises a plurality of filament lamps (4) and wherein said filament lamps are arranged such that their light emitting tubes (7A,7B) form concentric circles having different diameters; and wherein said first plurality of filament lamps (7A) and said second plurality of filament lamps (7B) are arranged in a staggered manner having coincident centers; and a mirror (5) for reflecting light emitted from said filament lamps (4), said mirror (5) comprising grooves (13) wherein the light emitting tubes (7A) of the filament lamps (4) of the first group of lamps are arranged, and wherein the grooves (13) are defined by side walls (5.1) protruding from said mirror (5) in the direction of the light emitting tubes (7B) of the filament lamps (4) of the second group of lamps. <IMAGE> |
