FLOATING CARRIER DEVICE

摘要

PURPOSE: To provide a floating carrier device capable of eliminating influence of the shape and weight of a planar substrate and quickly center aligning the planar substrate. CONSTITUTION: This device is provided with a planar carrier surface (upper surface). The device is provided with a base part for delivering a planar substrate along this carrier surface, a first jetting means floating the planar substrate from the carrier surface and moving the floated planar substrate along the carrier surface and a second jetting means (2F1 to 2H1, 2F2 to 2H2) jetting gas to keep the planar substrate floated by the first jetting means at a center position I2 of the carrier surface.