| 摘要 |
PURPOSE: An apparatus for driving a susceptor of vacuum depositing equipment is to detect position error for a loading position of the susceptor, thereby preventing the susceptor from being contacted with a robot arm. CONSTITUTION: A susceptor driving portion(12) lifts up and down a susceptor(10) according to a predetermined position. A detecting portion(25) detects a position of the susceptor and position error. The detecting portion detects the position error for a loading position of a substrate. The substrate is loaded on the susceptor by a robot arm. A supporting portion is driven by the driving portion to support the susceptor. A to-be-detected portion(29) has the first and second protrusion(28,30) disposed at the supporting portion in a different height. The detecting portion has the first and second sensor(24,26) opposite to the to-be-detected portion so that the first sensor is selectively contacted with the first protrusion and the second sensor is contacted with the second protrusion.
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