APPARATUS FOR ELIMINATING WAFER PARTICLE OF SEMICONDUCTOR STEPPER

摘要

PURPOSE: An apparatus for eliminating a wafer particle of a semiconductor stepper is provided to remove particles on a wafer holder, by mounting an air nozzle in a predetermined position of a wafer stage of the semiconductor stepper. CONSTITUTION: Air is induced to an air line(109). An air nozzle(106) sprays the air induced through the air line on an upper surface of a wafer holder(16). A switching valve(107) switches on/off the flow of the air sprayed through the air nozzle. A control unit(104) makes the switching valve switch on if an air driving signal is supplied from a driving detection unit. The control unit makes the switching valve switch off if an air stop signal is supplied from the driving detection unit.