| 摘要 |
<p>PURPOSE: To quickly perform the switching of a gas to be supplied to an apparatus and to prevent the mixing of a reactive gas. CONSTITUTION: This device comprises an apparatus connecting, passage 1 connected to one outflow port 13 of a 4-way valve sewing as a main selector valve 10, an exhaust passage 4 connected to the other outflow port 14, and gas supplying common passages 2, 3 connected to two inflow ports 11, 12. At least one of the two gas supplying common passages 2, 3 has a selector valve 20 consisting of a double 3-way valve or 4-way valve having two systems of gas supplying passages 21, 22 switchably connected thereto.</p> |
