Relative pressure sensor

摘要

The sensor (1) has a capacitive, resistive or piezoelectric sensor element (2) with a membrane (21) with an outer surface (211) in contact with a pressurized medium to be measured. A housing (7) incorporates a chamber (71) with an open front portion (72) closed by the membrane, and a bore (721) for a reference fluid. The housing is closed by a porous hydrophobic filter (8) having good thermal conductivity to maintain thermal equilibrium with the membrane. The filter is made of a sinter metal of special steel, bronze, or a metal sponge made of Titanium or Zirconium.