发明名称 |
PROCESS FOR PREPARING SILICA OR SILICA-BASED THICK VITREOUS FILMS ACCORDING TO THE SOL-GEL TECHNIQUE AND THICK FILMS THEREBY OBTAINED |
摘要 |
<p>A sol-gel process allowing preparation, on a substrate, of glassy films of silicon oxide or mixed oxides based on silicon oxide, of thickness above 1 micrometer, generally between 2 and 20 micrometers and characterized by absence of defects, that turn out to be particularly suitable as waveguides in flat optical devices.</p> |
申请公布号 |
EP1113987(A1) |
申请公布日期 |
2001.07.11 |
申请号 |
EP19990946432 |
申请日期 |
1999.09.06 |
申请人 |
NOVARA TECHNOLOGY S.R.L. |
发明人 |
COSTA, LORENZO;COSTA, PIER, PAOLO;GRANDI, STEFANIA |
分类号 |
G02B6/13;C01B33/14;C01B33/152;C03B8/02;C03B19/12;C03C1/00;C23C18/12;(IPC1-7):C01B33/12 |
主分类号 |
G02B6/13 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|