发明名称 METHOD OF PREPARATION FOR CHEMICALS AND ITS APPARATUS
摘要 <p>PURPOSE: To provide an apparatus for preparation for chemicals capable of reducing costs by using general industrial gases. CONSTITUTION: While the chemicals are prepared by dissolving the gas used in a general industry into pure water or a mixed solution stored in a chemicals preparing tank 21, at least either an exhaust gas controller 23 controlling the amount of exhaust gas or an exhaust water controller 24 draining the specified amount of chemicals from a gas dissolving part is used at the same time in the course of the dissolving process. Impurity of gas is contained in the exhaust gas and in the exhaust water. As a result, dissolving the general industrial gas and purifying the chemicals are performed at the same time.</p>
申请公布号 KR20010066895(A) 申请公布日期 2001.07.11
申请号 KR20000037890 申请日期 2000.07.04
申请人 FUJITSU LIMITED 发明人 FUKUIZUMI MASATAKA;MATOBA TORU;OSUDA HIROSHI
分类号 B01F1/00;B01F3/04;B01F15/04;B01J4/00;B01J4/02;B01J10/00;B01J19/26;B01L99/00;C01C1/02;C01C1/16;H01L21/304;(IPC1-7):H01L21/304 主分类号 B01F1/00
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