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发明名称
Verfahren zum selektiven AEtzen einer Halbleiteroberflaeche
摘要
申请公布号
DE1521966(A1)
申请公布日期
1970.02.05
申请号
DE19641521966
申请日期
1964.10.22
申请人
SIEMENS AG
发明人
SCHNELL,FRIEDRICH
分类号
C23F1/02;H01L21/00;H01L21/308
主分类号
C23F1/02
代理机构
代理人
主权项
地址
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