发明名称 Method for manufacturing semiconductor memory device
摘要 A semiconductor memory device includes a substrate, a first insulation layer formed on the substrate, a plurality of bit lines arranged on the first insulation layer, a second insulation layer formed all over the bit lines and having a plurality of first openings, an element isolating region formed on the second insulation layer, a plurality of island-like element forming semiconductor regions formed as surrounded by the element isolating region, a plurality of transistors respectively formed in the element forming semiconductor regions, and a plurality of capacitors respectively formed on the transistors. Each of the transistors includes a gate electrode insulatively formed on the element forming region, and a first and a second diffusion region formed on either side of the gate electrode, the first diffusion region being connected to a corresponding one of the bit lines through a via conductor formed in one of the first openings. Each of the capacitors has a storage electrode formed on the second diffusion region of each of the transistors.
申请公布号 US6258650(B1) 申请公布日期 2001.07.10
申请号 US19990460434 申请日期 1999.12.14
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 SUNOUCHI KAZUMASA
分类号 H01L21/8242;H01L27/108;H01L27/12;(IPC1-7):H01L21/824 主分类号 H01L21/8242
代理机构 代理人
主权项
地址
您可能感兴趣的专利