发明名称 Semiconductor device having multilayered gate electrode and impurity regions overlapping therewith
摘要 A semiconductor device using a TFT including a multilayered gate electrode and an LDD region partially overlapping with the multilayered gate electrode via a gate insulating film is provided.
申请公布号 US6259138(B1) 申请公布日期 2001.07.10
申请号 US19990464189 申请日期 1999.12.16
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD.;SHARP KABUSHIKI KAISHA 发明人 OHTANI HISASHI;YAMAZAKI SHUNPEI;ITOH MASATAKA
分类号 G02F1/1362;H01L21/336;H01L21/77;H01L21/84;H01L27/12;H01L29/49;H01L29/786;(IPC1-7):H01L27/01;H01L31/039 主分类号 G02F1/1362
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