| 摘要 |
A power-current measuring circuit 200 is structured such that two types of power supply circuits are selectively turned on in accordance with the number of chips which are formed on a wafer 60 and which must be measured. A power-current measuring circuit and a power-current detection device corresponding to the output are provided so that resolution accuracy required to perform measurement of the power current is maintained. A current-measuring-circuit selection circuit 56 enables outputs of the two types of the current measuring circuits to selectively be input to one conversion circuit. Therefore, a necessity for connecting the conversion circuit and its peripheral circuits to each of the current measuring circuit can be eliminated. As a result, the size of the circuit can be reduced.
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