发明名称 SOLID-STAGE IMAGE PICKUP ELEMENT AND MANUFACTURING METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a solid-state image pickup element and its manufacturing method, by which material cost can be reduced and an appropriate characteristic also obtained by using an inexpensive material for a substrate. SOLUTION: This solid-state image pickup element 10 is provided with pixels, having a photosensor PS and a semiconductor switching element 20 on a semiconductor thin film 15 formed by the catalyst CVD method on the plane of a light-transmitting substrate 11 provided with steps. In addition, this manufacturing method includes a step to form a semiconductor thin film 15 on the substrate 11 having steps for determining the crystal orientation on one plane, through the catalyst epitaxial growth, and a step to form the photosensor PS and semiconductor switching element 20 constituting the pixels on the semiconductor thin film 15.
申请公布号 JP2001189286(A) 申请公布日期 2001.07.10
申请号 JP19990375010 申请日期 1999.12.28
申请人 SONY CORP 发明人 KUSUMOTO NORIHIRO;YAMANAKA HIDEO;YAMOTO HISAYOSHI;YAGI HAJIME
分类号 C23C16/44;H01L21/285;H01L27/148;(IPC1-7):H01L21/285 主分类号 C23C16/44
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