发明名称 EDGE BEAD REMOVER
摘要 PROBLEM TO BE SOLVED: To provide an edge bead remover having an excellent resist dissolution rate, low toxicity and very high safety, excellent also in environmental preservation, giving out little unpleasant odor, having a relatively high boiling point and good operability, forming no residue or deposit and capable of efficiently producing a high-grade substrate for the production of electronic parts. SOLUTION: The edge bead remover contains methylα-hydroxyisobutyrate and a glycol monoalkyl ether acetate.
申请公布号 JP2001188359(A) 申请公布日期 2001.07.10
申请号 JP19990372832 申请日期 1999.12.28
申请人 MITSUBISHI GAS CHEM CO INC 发明人 NOGAMI GENKI;AOYAMA TETSUO
分类号 G03F7/38;B05D3/10;C11D7/26;C11D7/50;G03F7/42;H01L21/027;(IPC1-7):G03F7/38 主分类号 G03F7/38
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