摘要 |
PROBLEM TO BE SOLVED: To provide an edge bead remover having an excellent resist dissolution rate, low toxicity and very high safety, excellent also in environmental preservation, giving out little unpleasant odor, having a relatively high boiling point and good operability, forming no residue or deposit and capable of efficiently producing a high-grade substrate for the production of electronic parts. SOLUTION: The edge bead remover contains methyl '-hydroxyisobutyrate and an acetic ester. |