| 摘要 |
PROBLEM TO BE SOLVED: To provide an integrated circuit device which is capable of very accurately measuring the signal state of an optical electrode, provided in an integrated circuit by the use of an optoelectrical sampling technique. SOLUTION: Observation pads 106l, 106m, and 106n are varied in area, corresponding to signal intensities at wiring electrodes 103l, 103m, and 103n.
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