发明名称 INSPECTION APPARATUS
摘要 PROBLEM TO BE SOLVED: To obtain an inspection apparatus by which the image of an object to be inspected can be imaged in a more stable state. SOLUTION: In the inspection apparatus, the image of the object to be inspected is imaged, the image is processed and analyzed, and the object to be inspected is inspected. The inspection apparatus is provided with a nearly square imaging means which is mounted on a support base. The inspection apparatus is provided with a first support member which supports the front face used to fetch the image of the object, to be inspected, in the imaging means and which is fixed to the support base. The inspection apparatus is provided with a second support member which supports one side face of the imaging means and which is fixed to the support base. The inspection apparatus is provided with a third support member which supports the surface of the imaging means and which is fixed to the first support member or the second support member.
申请公布号 JP2001188050(A) 申请公布日期 2001.07.10
申请号 JP19990375343 申请日期 1999.12.28
申请人 SONY CORP 发明人 SUZUKI YASUYUKI;MIYASHITA TAKETO;MATSUYAMA TOSHINOBU
分类号 G01N21/956;H01L21/66;(IPC1-7):G01N21/956 主分类号 G01N21/956
代理机构 代理人
主权项
地址