| 摘要 |
PROBLEM TO BE SOLVED: To mount a micro ball on a work with high alignment probability by efficiently and stably distributing, without variations, a micro ball to a jug, such an array jig and suction jug. SOLUTION: A cylinder 58 is provided with an ultrasonic wave vibrator 57. A drive circuit is provided which supplies a drive current to the ultrasonic wave vibrator 57 for ultrasonic wave vibration. A controller is provided, where the drive current is supplied to the ultrasonic wave vibrator 57 from the drive circuit, so that a standing wave comprising concentric nodes is generated inside the cylinder 58 moving on a sucking jug 33 for a micro ball B to be converged on the node, distributing to the sucking hole of the sucking jig 33. A temperature sensor 59, which detects the temperature of cylinder 58, is provided. If the controller determines, based on the detection signal from the temperature sensor 59, that the temperature of the cylinder 58 is higher than a set temperature range, a cooling mechanism 15 is actuated to cool down the cylinder 58, while if it is determined to be lower, the ultrasonic wave vibrator 57 is vibrated and heated, to keep it within a set temperature range.
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