| 摘要 |
In one discharge tube in which laser gas flows, a plurality of microwave generating units composed of microwave power sources, magnetrons and waveguides are disposed, and each magnetron oscillates intermittently by switching the drive of the microwave power source. A main controller provides a reference clock to a power source unit composed of the plurality of microwave power sources. By this reference clock, adjacent microwave power sources in the power source unit are switched and driven at a predetermined phase difference through a phase shifter. Accordingly, discharge interference in adjacent discharge areas is avoided, so that a stable laser beam output may be obtained.
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