Nanoscopic thermoelectric coolers

摘要

Thermoelectric cooler for providing sub-ambient cooling and method of fabricating same. In one form, sub-micron thermoelectric coolers are formed using doped thin films as thermoelectric elements. The thin film thermoelectric elements are created on thermally and electrical isolating materials using an electrochemical deposition process with a junction formed between the thermoelectric elements. The sub-micron thermoelectric coolers can then be used to locally cool nanoscopic geometric regions such as regions of an integrated circuit or can be configured in an array for large scale microscopic cooling applications.