| 摘要 |
A silicon gyroscope comprises a vibrator 1 which is made from a silicon wafer and has three elastic arms 2 separated by two notches, with part of the root section of vibrator which supports the elastic arms being fixed to a base plate 3, horizontal electrodes 4 which are laid between the elastic arms and on the outer sides of the elastic arms by being orthogonal to the plane of layout of the elastic arms and close to the elastic arms, and vertical electrodes 5 which are laid in correspondence to the elastic arms by being parallel to the arm layout plane and close to the elastic arms. The silicon gyroscope which is driven in innovative manner is capable of stably detecting the angular velocity.
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