发明名称 Methods of forming silicon-comprising materials having roughened outer surfaces, and methods of forming capacitor constructions
摘要 In one aspect, the invention includes a method of forming a silicon-comprising material having a roughened outer surface. A semiconductive substrate is provided which comprises conductively doped silicon. A layer comprising silicon and germanium is formed over the substrate. The layer is exposed to conditions which cause crystalline grains within it to increase in size until roughness of a surface of the layer is increased. Dopant is out-diffused from the conductively doped silicon and into the crystalline grains of the layer to conductively dope the layer. In another aspect, the invention includes a method of forming a capacitor construction. A substrate is provided and a conductively doped silicon-comprising material is formed to be supported by the substrate. A layer is formed against the conductively doped silicon-comprising material. The layer has an outermost surface, and comprises silicon and germanium. The layer is subjected to conditions which increase a roughness of the outermost surface. The layer and the conductively doped silicon-comprising material together define a first capacitor electrode. Dopant is out-diffused from the conductively doped silicon-comprising material and into the layer. A dielectric layer is formed against said outermost surface. A second capacitor electrode is formed to be separated from the first capacitor electrode by the dielectric layer.
申请公布号 US6258664(B1) 申请公布日期 2001.07.10
申请号 US19990251264 申请日期 1999.02.16
申请人 MICRON TECHNOLOGY, INC. 发明人 REINBERG ALAN R.
分类号 H01L21/02;H01L21/8242;(IPC1-7):H01L21/824 主分类号 H01L21/02
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