Method for improving the resistance degradation of thin film capacitors

摘要

A method for ion implantation of high dielectric constant materials with dopants to reduce film leakage and improve resistance degradation is disclosed. Particularly, the invention relates to ion implantation of (Ba,Sr)TiO3 (BST) with donor dopants to reduce film leakage and improve resistance degradation of the BST film. The invention also relates to varying the ion implantation angle of the dopant to uniformly dope the high dielectric constant materials when they have been fabricated over a stepped structure. The invention also relates to integrated circuits having a doped thin film high dielectric material used as an insulating layer in a capacitor structure.