发明名称 |
Combined enhanced shock load capability and stress isolation structure for an improved performance silicon micro-machined accelerometer |
摘要 |
The present invention provides an acceleration sensor and an accelerometer having isolation structure formed using a bulk straight wall deep reactive ion etch process, whereby external stress sources are isolated from active accelerometer components.
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申请公布号 |
US6257060(B1) |
申请公布日期 |
2001.07.10 |
申请号 |
US19990432306 |
申请日期 |
1999.11.02 |
申请人 |
ALLIEDSIGNAL INC. |
发明人 |
LEONARDSON RONALD B.;BLAKE GRAEME A. |
分类号 |
G01P15/08;G01P15/097;G01P15/10;(IPC1-7):G01P15/10 |
主分类号 |
G01P15/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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