| 摘要 |
PROBLEM TO BE SOLVED: To provide a height measuring device of a simple configuration which allows faster measurement process speed even with a high resolution camera. SOLUTION: A light source 12 which emits slit beam 13 to an object 11 whose height is measured, an image sensor 15 such as a high resolution camera which takes-in the slit beam image on the part whose height is measured with a sight field of the object from an angle different from the irradiation direction of slit beam, are provided. Here, related to an image process means 17, only an image signal of a region A on an imaging plane 15b of the image sensor where a slit beam image 16 can be imaged is partially read, and the height of object is obtained from the slit beam image contained in the image signal.
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