| 摘要 |
PROBLEM TO BE SOLVED: To provide the driving method of a stage that can reduce fluctuation in the temperature of a driving apparatus, and can suppress mechanical change in the stage caused by heat, and the stage. SOLUTION: This driving method of a stage has a stage a part 32 and driving apparatuses 62 to 65, and moves the stage part 32 by thrust being generated by the driving apparatuses 62 to 65. The driving method includes a first mode for driving at least one of the driving apparatuses 62 to 65 so that the stage part 32 is moved, and a second mode for driving the driving apparatuses 62 to 65 so that the thrust operating on the stage part 32 is cancelled. |
