| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor defect sorting method which is high in sorting accuracy and efficiency. SOLUTION: A semiconductor defect sorting method comprises a first step S01, in which defects that reside in a check object are detected, a second step S02 in which the detected defects are sorted by population, a third step S03 in which a sampling plan is designed for each population, a fourth step S04 in which defects belonging to the populations are sampled in accordance with the sampling plans respectively, a fifth step S05 in which the ratio of the total number of defects comprised in each population to the number of the sampled defects in the population is calculated for each population, a sixth step S06 in which the sampled defects are automatically sorted out, and a seventh step S07 in which the number of the automatically sorted defects is divided by the ratio of the total number of defects of each population to the number of the defects of the population sampled. |
