SUPPORTING UNIT FOR QUARTZ BOAT IN ASHING FACILITIES

摘要

PURPOSE: A supporting unit for a quartz boat in ashing facilities is provided to prevent damage to the supporting unit caused by a loading operation of the supporting unit, by reducing impact on a side surface of the supporting unit by using a lifter. CONSTITUTION: A main body(1) has a settling groove(2) of a predetermined diameter , in which a quartz boat is settled in the settling groove. A sensing unit(4) is installed in a predetermined depth to sense the quartz boat settled in the settling groove. A plurality of reinforcing pieces is adhered to a portion in contact with a lifter of side surfaces of the main body.