| 摘要 |
PURPOSE: An exposure apparatus is provided, which comprises a base plate control part to make it easy to control the base plate for a step compensation of an exposure connection part. CONSTITUTION: The exposure apparatus comprises a base plate(31) and a top plate(31a), a frame(32) installed between the above plates, a top die(33) installed in the middle of the frame and a bottom die(34). An exposure mask is installed between the top die and the bottom die. Also, an imaging camera(38) is installed on both sides of an upper part of the top die, and a step coverage of an exposure connection part can be controlled as monitoring an image acquired from the imaging camera. The base plate is supported by a bracket. A ball supporting structure is connected to the bracket from the bottom, and a ball comprised in the ball supporting structure and the base plate are contacted by a point contact.
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