,申请号JP19970134603-传众专利搜索

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发明名称
摘要
申请公布号	JP3183214(B2)	申请公布日期	2001.07.09
申请号	JP19970134603	申请日期	1997.05.26
申请人		发明人
分类号	B08B7/00;B24C1/00;B24C3/18;H01L21/00;H01L21/304;H01L21/306;(IPC1-7):H01L21/304	主分类号	B08B7/00
代理机构		代理人
主权项
地址

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