CERAMIC SUBSTRATE FOR MANUFACTURING/INSPECTING SEMICONDUCTOR, HOT PLATE, AND SEMICONDUCTOR MANUFACTURING/INSPECTING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a hot plate which is capable of solving problems of prior art and has good quality and performance as well as low cost. SOLUTION: Accessories 2 are fixed to a bottom surface of a hot plate 1, which is provided with electrical heating means and made from ceramic sintered material, by a silicone adhesive 3.