发明名称 |
CMOS IMAGE SENSOR HAVING PHOTO DIODE CONNECTED WITH CAPACITOR AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
PURPOSE: A CMOS image sensor having a photo diode connected with a capacitor and a method for manufacturing the same are provided to reduce an area of a photo diode and obtain a capacitance by connecting a photo diode with a capacitor. CONSTITUTION: An isolation layer(402) is formed locally on a semiconductor layer(401). A plate node(404b) of a capacitor is formed by inserting an insulating layer into the semiconductor layer(401). A photo diode(406) is formed on a lower portion of a surface of the semiconductor layer(401). A capacitor dielectric(408) covers the plate node(404b). A storage node(409) of the capacitor contacted with the photo diode(406) is formed on the capacitor dielectric(408). A contact medium conductive layer is formed to connect the storage node(409) with the photo diode(406).
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申请公布号 |
KR20010061346(A) |
申请公布日期 |
2001.07.07 |
申请号 |
KR19990063839 |
申请日期 |
1999.12.28 |
申请人 |
HYNIX SEMICONDUCTOR INC. |
发明人 |
HAN, JIN SU;OH, HUN SANG |
分类号 |
H01L21/8234;H01L27/06;H01L27/146;H01L31/10;(IPC1-7):H01L27/146 |
主分类号 |
H01L21/8234 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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