发明名称 CMOS IMAGE SENSOR HAVING PHOTO DIODE CONNECTED WITH CAPACITOR AND METHOD FOR MANUFACTURING THE SAME
摘要 PURPOSE: A CMOS image sensor having a photo diode connected with a capacitor and a method for manufacturing the same are provided to reduce an area of a photo diode and obtain a capacitance by connecting a photo diode with a capacitor. CONSTITUTION: An isolation layer(402) is formed locally on a semiconductor layer(401). A plate node(404b) of a capacitor is formed by inserting an insulating layer into the semiconductor layer(401). A photo diode(406) is formed on a lower portion of a surface of the semiconductor layer(401). A capacitor dielectric(408) covers the plate node(404b). A storage node(409) of the capacitor contacted with the photo diode(406) is formed on the capacitor dielectric(408). A contact medium conductive layer is formed to connect the storage node(409) with the photo diode(406).
申请公布号 KR20010061346(A) 申请公布日期 2001.07.07
申请号 KR19990063839 申请日期 1999.12.28
申请人 HYNIX SEMICONDUCTOR INC. 发明人 HAN, JIN SU;OH, HUN SANG
分类号 H01L21/8234;H01L27/06;H01L27/146;H01L31/10;(IPC1-7):H01L27/146 主分类号 H01L21/8234
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