| 摘要 |
PURPOSE: A cleaning apparatus is to rearrange a plurality of baths according to change of cleaning process, thereby removing possibility of purchase of a new cleaning apparatus. CONSTITUTION: The cleaning apparatus comprises a loader(20), a bath(30) and an unloader(60). The baths are arranged between the loader and the unloader. The loader is loaded with a cassette for receiving a substrate to be cleaned. The unloader is loaded with a cassette for receiving a cleaned substrate. Since the baths are separately connected, position of the baths are easily adjusted. The baths are sequentially arranged to perform a cleaning operation along its cleaning order. When the order of the cleaning is changed, the position of the baths is accordingly changed. The baths comprise a dry bath(50) for drying the substrate which is cleaned in a bath(32,36). A pipe line and a drain line are integrally installed in the bath.
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