| 摘要 |
PURPOSE: A transfer arm is provided to transfer a semiconductor substrate and the like with high accuracy and to obtain high durability. CONSTITUTION: In a transfer arm,, a short pitch of a first parallel link(10) and a short pitch of a second parallel link(20) are shared and are connected as a base, an angle is changed between the arms(11, 12) of the first parallel link(10) and arms(21, 22) of the second parallel link(20) by a cornering operation on a joint shaft(J1) of an arm end of the first parallel link(10), a transfer stage(50) disposed on a free end of the second parallel link(20) is shifted linearly. Thus, the transfer arm comprises a linear guide having a guide rail(33) along a center axis(Cr) on a base(30) between the first parallel link(10) and the second parallel link(20), a slider(31) running on the guide rail(33), and a synchronizing link(40) for connecting joint shafts(27, 28) that are symmetric to each other with respect to the linear guide. The joint shafts(27, 28) support the arm ends of the first parallel link(10) and the second parallel link(20) on both ends of the short pitches. |
