发明名称 |
INK TANK PIPE OF INKER FOR SEMICONDUCTOR TEST EQUIPMENT |
摘要 |
PURPOSE: An ink tank pipe of an inker for semiconductor test equipment is provided to dot properly an ink on a surface of a wafer by preventing a spreading phenomenon of ink formed on a lower portion of ink tank pipe. CONSTITUTION: An ink tank pipe(27) has a concave groove(27a) formed on a lower face of the ink tank pipe(27). The concave groove(27a) prevents a spreading phenomenon of ink to a surface of a wafer(18) in an ink dotting process by reducing the amount of ink projected from the lower portion of the ink tank pipe(27) to a lower direction of the ink tank pipe(27). The concave groove(27a) of the ink tank pipe(27) has a streamline shape.
|
申请公布号 |
KR20010060449(A) |
申请公布日期 |
2001.07.07 |
申请号 |
KR19990062729 |
申请日期 |
1999.12.27 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
LEE, MYEONG U |
分类号 |
H01L21/66;(IPC1-7):H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|