发明名称 INK TANK PIPE OF INKER FOR SEMICONDUCTOR TEST EQUIPMENT
摘要 PURPOSE: An ink tank pipe of an inker for semiconductor test equipment is provided to dot properly an ink on a surface of a wafer by preventing a spreading phenomenon of ink formed on a lower portion of ink tank pipe. CONSTITUTION: An ink tank pipe(27) has a concave groove(27a) formed on a lower face of the ink tank pipe(27). The concave groove(27a) prevents a spreading phenomenon of ink to a surface of a wafer(18) in an ink dotting process by reducing the amount of ink projected from the lower portion of the ink tank pipe(27) to a lower direction of the ink tank pipe(27). The concave groove(27a) of the ink tank pipe(27) has a streamline shape.
申请公布号 KR20010060449(A) 申请公布日期 2001.07.07
申请号 KR19990062729 申请日期 1999.12.27
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE, MYEONG U
分类号 H01L21/66;(IPC1-7):H01L21/66 主分类号 H01L21/66
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