发明名称 |
REMOVER FOR PHOTORESIST AND METHOD FOR REMOVING PHOTORESIST USING SAME |
摘要 |
PURPOSE: To provide a remover composition for a photoresist suitable for use particularly in the production of a liquid crystal panel device and excellent in property of preventing the corrosion of a substrate with metallic wiring and an inorganic material layer as well as in ability to remove a photoresist film and a degenerated film and a method for removing a photoresist using the removing solution composition. CONSTITUTION: The remover for a photoresist contains (a) hydroxylamines, (b) an aromatic hudroxy compound, (c) benzotriazole or its derivative, (d) amines each having an acid dissociation constant (pKa) of 7.5-13 in an aqueous solution at 25deg.C and (e) a water-soluble organic solvent and/or (f) water. |
申请公布号 |
KR20010062778(A) |
申请公布日期 |
2001.07.07 |
申请号 |
KR20000082982 |
申请日期 |
2000.12.27 |
申请人 |
TOKYO OHKA KOGYO CO., LTD. |
发明人 |
KOBAYASHI MASAKAZU;WAKIYA KAZUMASA |
分类号 |
H01L21/027;G03F7/40;G03F7/42 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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