| 摘要 |
PURPOSE: A stage assembly for an exposure device is provided to move and position objects for alignment. CONSTITUTION: The stage assembly(10) has fine-adjustment and coarse- adjustment stages(14 and 18). The fine-adjustment stage(14) includes a holder(15) holding an object(24). The stage assembly comprises a fine- adjustment Y mover(32) and a fine-adjustment X mover(34) moving accurately the fine-adjustment stage relative to the coarse-adjustment stage. The fine-adjustment movers(32,34) are provided only on one side of the holder(15). Thus, the stage assembly(10) is relatively light, having a relatively high servo bandwidth, and is easily accessed for operation. The stage assembly(10) may comprise an anti-gravity mechanisms(40) minimizing distortion of a stage base(12) as well as reaction assembly(20) which reduces the amount of reaction propagating from the coarse-adjustment stage. |
