| 摘要 |
PURPOSE: A device for forming a coating film is provided to facilitate the washing of mask members, which are installed in a device forming a coating film of an uniform film thickness onto a substrate and cover the surface of the substrate other than an area on which the coating film is formed, and to suppress the enlargement of the device. CONSTITUTION: The device for forming a coating film on a substrate includes a substrate holding portion for holding the substrate; a coating solution nozzle(3), provided to face the substrate held by the substrate holding portion, for discharging a coating solution to the substrate; a drive mechanism for moving the coating solution nozzle(3) along a surface of the substrate relatively with respect to the substrate while the coating solution is being discharged to the surface of the substrate from the coating solution nozzle; a mask unit(4) covering a portion other than a coating film formation area of the substrate(W) and including a mask member(41) for catching the coating solution from the coating solution nozzle(3), and a cleaning mechanism, provided in the mask unit(4), for cleaning a coating film adhering to the mask member(41).
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