SYSTEM FOR CONTROLLING MULTIPLE TOOLS, METHOD AND MEDIUM FOR THE SAME

摘要

PURPOSE: A system for controlling multiple tools, method and medium for the same are provided to facilitate communication between tools in a semiconductor treatment facility. CONSTITUTION: The system for controlling multiple tools includes communication control(210-214), which makes the direct communication between tools(1-2) possible without using any separated module controller(216). The tools(1-2) include sufficient 'information' for example, computer mechanisms incorporated in the communication control(210-214) for making communication by processing the information on a wafer treated by means of the tools(1-2). This information enables the tools(1-2) to communicate directly with each other and utilizes at least several various protocols and techniques.