MANIPULATOR FOR INSPECTING SEMICONDUCTOR WAFER

摘要

PURPOSE: A manipulator for inspecting a semiconductor wafer is provided to enhance test reliability with low price and easy adjustment by enabling a test head to be elevated and rotated. CONSTITUTION: An upper frame(10) is mounted with the first driving motor(11) and a pair of arms(12) for gripping a test head. A number of connecting plates(12a) is arranged between the arms(12). Each of the connecting plates(12a) is respectively fixed by the arms(12) to form a space. A transmission(13) is connected to an upper side of the first driving motor(11), and the transmission(13) transmits a rotational force from the first driving motor to the each arm(12). A test head(14) is mounted between the arms(12). The rotation force from the first motor(11) is transmitted to the arms(12), and the test head(14) is rotationally displaced together with the arms(12). A number of legs(15) are arranged at both lower parts of the frame(10). A number of shafts(21) are mounted as opposed to the legs(15), and inserted into guide holes of the legs(15) to guide vertical motion of the frame(10).