REFERENCE IMAGE GENERATING METHOD, PATTERN INSPECTING DEVICE, AND RECORDING MEDIUM WITH RECORDED REFERENCE IMAGE GENERATING PROGRAM

摘要

PURPOSE: To accurately find the pattern width of an inspected pattern and the pattern correction width of reference data by detecting an edge position of the inspected pattern fast. CONSTITUTION: An optical scanning part 4 scans the inspected pattern with a laser beam and a photoelectric image processing part 5 generates an image of the inspected pattern. A reference image generation part 3 finds an edge border condition and detects the edge position through convolutional operation between an optical point spread function corresponding to the intensity of the laser beam and the image of a measured pattern. The reference image generation part 3 calculates gradation values of respective pixels according to the number of subpixels belonging to patterns expanded in the respective pixels and regards the frequency values, obtained by dividing the gradation values by the number of gradation steps, as the width of the patterns expanded in the pixels to calculate the pattern width of the measured pattern and reference data.