发明名称 METHOD FOR FORMING MICRO LENS OF IMAGE SENSOR
摘要 PURPOSE: A method for forming a micro lens of an image sensor is provided to increase sensitivity of an image sensor by maximizing a focus efficiency of a micro lens. CONSTITUTION: The first photoresist for micro lens is applied on a substrate. The first photoresist pattern is formed by exposing and developing selectively the photoresist. The first micro lens(32a) is formed by flowing and hardening the first photoresist. The second photoresist is applied thereon. The second photoresist pattern is formed by exposing and developing selectively the second photoresist. The second micro lens(34a) is formed by flowing and hardening the second photoresist.
申请公布号 KR20010061586(A) 申请公布日期 2001.07.07
申请号 KR19990064082 申请日期 1999.12.28
申请人 HYNIX SEMICONDUCTOR INC. 发明人 PARK, GI YEOP
分类号 H01L27/146;(IPC1-7):H01L27/146 主分类号 H01L27/146
代理机构 代理人
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