METHOD AND SYSTEM FOR AUTOMATIC PROCESS FOR NON-PRODUCT WAFER INCLUDING PRODUCT WAFER, AND RECORD MEDIUM ON WHICH THE METHOD IS RECORDED

摘要

PURPOSE: To perform unmanned transport control and information management, etc., corresponding to individual use application. CONSTITUTION: A host computer 1 receives transfer requirements from a process device 3 (4, 5), and dispatches the requirements to a trigger for a product lot containing non-product wafers kept in custody in a storage shelf 6, and sends a transfer command for the target lot to an AMHS 7. In the process devices, for example, there are devices that conducts processes, while holding a dummy wafer or requires a ware for cleaning reproduction with a specified frequency. By setting a usage application division to the transport requirement from these process devices, the non-product wafer that the device requires is transferred with required timing. Further, it is possible that the non-product wafer processed for the purpose of product assurance is judged from its flow and use application division and processing information of the non-product wafer can be made to link to the history of the product lot.